Vu Van, H., Nguyen, T.D., Duong Thi Thanh , H., Trương Thị Thanh Tâm and Giáp Thị Thùy 2023. Lower driving voltage for V-shaped Electrothermal Microactuator based on the surface sputtering process. Journal of Military Science and Technology. 92, 92 (Dec. 2023), 21–29. DOI:https://doi.org/10.54939/1859-1043.j.mst.92.2023.21-29.