VU VAN, H.; NGUYEN, T. D.; DUONG THI THANH , H.; TRƯƠNG THỊ THANH TÂM; GIÁP THỊ THÙY. Lower driving voltage for V-shaped Electrothermal Microactuator based on the surface sputtering process. Journal of Military Science and Technology, [S. l.], v. 92, n. 92, p. 21–29, 2023. DOI: 10.54939/1859-1043.j.mst.92.2023.21-29. Disponível em: https://en.jmst.info/index.php/jmst/article/view/838. Acesso em: 21 nov. 2024.